本书系统、全面地阐述了智能传感器理论基础及应用技术，全书内容共7 章，第1 章绪论，介绍智能 传感器的历史背景及发展现状；第2 章智能传感器智能化功能及其实现技术，重点介绍智能传感器的基本功能、数据处理方式及其实现途径；第3 章智能传感器信息处理技术，介绍预测滤波器、时-频分析法、数据驱动法、熵方法、模式识别法5 种智能传感器信息处理技术；第4 章自确认传感器技术，介绍自确认传感器原理、结构、自确认传感器方法、主要功能；第5 章智能声发射传感器及其应用，介绍智能声发射传感器检测术及其在轴承故障诊断系统中的应用；第6 章智能气体传感器及其应用，介绍智能气体传感器技术及其在大气污染物检测中的应用；第7 章智能压力传感器及其应用，介绍智能压力传感器技术及其在火箭发动机试验台系统中的应用。

前 言 传感器是自动控制系统中用于获取信息的关键器件。一方面，自动化技术水平越高，自动控制系统对传感器技术的依赖程度越高；另一方面，传感器测量值的准确性和有效性直接影响自动控制系统的性能。 在近20 年来，传感器技术的重要发展方向之一是智能传感器。随着材料科学、大规模集成电路及微型处理器的不断进步，智能传感器得到了空前的发展。据报道，由于智能传感器具有强大的信号处理功能，大多数系统工程师都倾向于建议采用智能传感器进行自动控制系统的开发与设计。传统传感器一直被用于自动控制系统以测量各种过程参数。当信号调理电路与传感器连接时，可以有效地提高传感器的性能。信号调理操作在自动控制系统中非常常见，并且在测量和过程控制领域已经普遍应用。随着微处理器和数字处理技术的出现，这种信号调理操作得到了迅速发展。人们发现这些技术对自动控制系统性能具有良好的促进作用。许多配备了微处理器的智能传感器吸引了大量的消费者。微处理器对智能传感器提供了硬件支持与软件载体，使得智能传感器信息处理技术得到进一步发展。 本书内容共7 章，讨论了一些实用的智能传感器信息处理技术并介绍了几种智能传感 器的典型应用案例。编者一直致力于研究智能传感器及其信息处理，本书是编者多年来在智能传感器领域的科研成果积累和教学经验的总结，凝聚了近年来诸多新的研究成果。本书部分章节内容涉及多位同人的工作，部分内容已在国内外相关刊物上发表。宋凯编写第5、6、7 章，陈寅生编写第3、4 章，张洪泉编写第1、2 章并统稿。 本书所涉及的研究内容得到了基础加强重点项目（2019-JCJQ-ZD-235-00）、国家自然科学基金（61803128、61473095、61327804、61201306、60971020）、国家重点项目（2016YFE0110500、2006AA040101）、中国博士后科学基金（2020M670920）、航天科学技术基金（ JZJJX20190013 、JZ20180213 、JZ20170204 ）、黑龙江省级财政资助项目（GX17A014）、国家重点实验室开放项目（SKT1905）和黑龙江省博士后基金（LBH-Z19167）的支持。在本书出版之际，致以诚挚的感谢！ 由于编者水平有限，书中定然存在不足之处，希望广大读者批评指正。 编 者 2020 年5 月

目 录 第1 章 绪论 ···············································································································.1 1.1 传感器技术概述 ································································································.1 1.2 现代传感器技术 ···································································································.2 1.2.1 现代传感器技术特征 ····················································································.2 1.2.2 集成/固态传感器的特点 ··············································································.2 1.3 智能传感器概述 ······································································································.3 1.3.1 智能传感器的定义 ························································································.3 1.3.2 智能传感器的特点 ·····························································································.5 1.3.3 智能传感器的组成 ·····························································································.6 1.3.4 智能传感器的形式 ···························································································.7 1.3.5 传感器智能化的途径 ·························································································.8 1.3.6 智能传感器的发展及趋势······················································································.8 1.3.7 智能传感器的开发重点 ························································································.9 1.4 智能传感器中的软件方法 ························································································.9 1.4.1 软件子模块 ·······································································································.10 1.4.2 预处理 ··············································································································.10 1.4.3 状态监测与故障检测模块 ······················································································.11 1.5 智能传感器的实现方式 ··························································································.12 1.5.1 非集成化智能传感器 ···················································································.12 1.5.2 集成化智能传感器 ·······················································································.12 1.5.3 智能传感器混合集成 ·······················································································.13 参考文献 ·················································································································.14 第2 章 智能传感器智能化功能及其实现技术 ·····························································.15 2.1 智能传感器的基本功能 ······················································································.15 2.1.1 智能传感器的自检技术 ··················································································.15 2.1.2 智能传感器的自动校准技术 ··········································································.20 2.1.3 智能传感器的量程自动转换技术········································································.23 2.1.4 智能传感器的标度变换技术 ··············································································.26 2.2 智能传感器测量数据处理 ·····················································································.28 2.2.1 测量数据的非数值处理 ·····················································································.28 2.2.2 系统误差的数据处理 ·······················································································.33 2.2.3 随机误差的数据处理 ·················································································.42 参考文献 ···········································································································.45 第3 章 智能传感器信息处理技术 ···········································································.46 3.1 概述 ·············································································································.46 3.2 预测滤波器 ····································································································.46 3.2.1 多项式预测滤波器 ··············································································.46 3.2.2 灰色预测滤波器 ····························································································.47 3.3 时–频分析法 ·········································································································.50 3.3.1 小波包分析 ·································································································.50 3.3.2 经验模态分解 ····························································································.51 3.3.3 集合经验模态分解 ·······················································································.52 3.3.4 互补集合经验模态分解 ···············································································.54 3.4 数据驱动法 ····································································································.55 3.4.1 主成分分析 ································································································.55 3.4.2 动态主成分分析 ·························································································.57 3.4.3 独立成分分析 ·························································································.58 3.4.4 核主成分分析 ··························································································.59 3.4.5 非负矩阵分解 ····························································································.61 3.4.6 稀疏非负矩阵分解 ····················································································.63 3.5 熵方法 ·········································································································.66 3.5.1 能量熵 ····································································································.67 3.5.2 样本熵 ······································································································.68 3.5.3 排列熵 ····································································································.71 3.5.4 多尺度熵 ··································································································.72 3.6 模式识别法 ·······························································································.73 3.6.1 k 最近邻域 ·····························································································.73 3.6.2 层次支持向量多分类机 ·········································································.74 3.6.3 多分类相关向量机 ·····················································································.77 3.6.4 随机森林分类器 ·······················································································.79 3.6.5 稀疏表示分类器 ····························································································.80 参考文献 ···············································································································.82 第4 章 自确认传感器技术 ······················································································.85 4.1 概述 ··········································································································.85 4.2 自确认传感器原理 ·························································································.86 4.2.1 自确认传感器功能结构模型 ········································································.86 4.2.2 自确认传感器的输出参数 ·················································································.88 4.2.3 自确认传感器的研究内容 ····················································································.89 4.3 常用的自确认传感器方法 ·········································································.93 4.3.1 传感器故障检测与隔离方法 ··········································································.93 4.3.2 传感器故障诊断方法 ·················································································.95 4.3.3 传感器故障恢复方法 ··············································································.97 4.3.4 传感器测量质量评估方法 ·············································································.102 4.4 自确认传感器结构 ··························································································.107 参考文献 ··········································································································.110 第5 章 智能声发射传感器及其应用 ········································································.115 5.1 声发射信号 ····································································································.115 5.1.1 声发射源 ···························································································.115 5.1.2 声发射信号基本概念 ·············································································.116 5.1.3 声发射信号特征及表征参数 ································································.117 5.2 智能声发射传感器概述 ················································································.119 5.2.1 智能声发射传感器分类 ·············································································.119 5.2.2 智能声发射传感器原理 ··············································································.120 5.2.3 智能声发射传感器结构 ···············································································.121 5.3 智能声发射传感器检测技术 ·············································································.122 5.3.1 声发射技术原理 ······················································································.122 5.3.2 声发射信号处理方法 ·················································································.123 5.3.3 声发射无损检测技术的优势及应用 ·····························································.125 5.4 智能声发射传感器在滚动轴承故障检测中的应用 ··················································.126 5.4.1 故障滚动轴承的声发射信号 ····································································.126 5.4.2 故障特征提取 ·························································································.127 5.4.3 滚动轴承声发射信号智能故障诊断模型 ····················································.133 参考文献 ······································································································.142 第6 章 智能化气体传感器及其应用 ··································································.143 6.1 气体传感器概述 ························································································.143 6.2 智能气体传感器精度提升算法 ·········································································.144 6.2.1 气体传感器选择性改善方法 ·····································································.145 6.2.2 气体传感器温/湿度补偿方法 ······································································.155 6.3 智能气体传感器数据恢复方法 ·······································································.160 6.3.1 相关向量机基本理论 ···············································································.160 6.3.2 相关向量机核函数选择 ···············································································.162 6.3.3 基于相关向量机的气体传感器故障数据恢复 ·················································.164 6.4 智能气体传感器的故障诊断 ··················································································.168 6.4.1 气体传感器故障模式分析 ···············································································.168 6.4.2 气体传感器在线故障检测 ········································································.170 6.4.3 基于核主成分分析的气体传感器故障特征提取 ···················································.173 6.4.4 基于多分类相关向量机的气体传感器故障诊断 ··························································.176 参考文献 ···············································································································.179 第7 章 智能压力传感器及其应用 ·········································································.180 7.1 压力传感器工作原理概述 ···············································································.180 7.2 压力传感器的故障模式 ·················································································.180 7.2.1 常见压力传感器的故障类型 ·····································································.180 7.2.2 压力传感器的故障模式分类 ·······························································.182 7.3 智能压力传感器故障诊断方法 ··········································································.182 7.3.1 基于多尺度主成分分析的故障诊断方法 ························································.183 7.3.2 基于小波包的多尺度主成分分析故障诊断方法 ············································.187 7.4 故障诊断方法仿真验证 ·····················································································.188 7.4.1 基于小波变换的多尺度主成分分析诊断方法仿真验证 ········································.188 7.4.2 基于小波包的MSPCA 诊断方法仿真验证 ·······················································.195 7.5 基于径向基函数（RBF）神经网络的数据恢复方法 ·············································.199 7.5.1 RBF 神经网络原理概述 ·················································································.199 7.5.2 RBF 神经网络结构 ··················································································.200 7.5.3 RBF 神经网络的学习算法 ············································································.201 7.5.4 压力传感器数据恢复仿真研究 ································································.202 参考文献 ·····································································································206

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